Gesundheitliche Risiken durch Plasmaaetzprozesse in der Halbleiterindustrie Schlussbericht

Authors

• Bauer, S.
• Wolff, I.
• univ., leipzig
• Halle-Wittenberg Univ., Halle (Germany)....
• Halle-Wittenberg Univ., Halle (Germany)....
• Halle-Wittenberg Univ., Halle (Germany)....

Publication Date

Jan 01, 1995

Source

OpenGrey Repository

Keywords

• 03G - Environmental Health, Environmental Safety
• 09A - Components
• Health Risks: M
• Plasma Etching: M
• Semiconductor Industry: M
• Microelectronic Devices: M
• Environmental Effects
• Genotoxicity
• Waste Products
• Chlorinated Hydrocarbons
• Occupational Safety

Language

German

License

Unknown

External links

• Full record on hdl.handle.net