Germany
Gesundheitliche Risiken durch Plasmaaetzprozesse in der Halbleiterindustrie Schlussbericht Authors Bauer, S. Wolff, I. univ., leipzig Halle-Wittenberg Univ., Halle (Germany).... Halle-Wittenberg Univ., Halle (Germany).... Halle-Wittenberg Univ., Halle (Germany).... Publication Date Jan 01, 1995 Source OpenGrey Repository Keywords 03G - Environmental Health, Environmental Safety 09A - Components Health Risks: M Plasma Etching: M Semiconductor Industry: M Microelectronic Devices: M Environmental Effects Genotoxicity Waste Products Chlorinated Hydrocarbons Occupational Safety Language German License Unknown External links Full record on hdl.handle.net Abstract Germany