A layer of SiOx was deposited on the surface of poly(L-lactic acid) (PLLA) film to fabricate a PLLA/SiOx layered film, by plasma-enhanced chemical vapor deposition (PECVD) process. PLLA/SiOx film showed Young's modulus and tensile strength increased by 119.2% and 91.6%, respectively, over those of neat PLLA film. At 5 °C, the oxygen (O2 ) and carbon dioxide (CO2 ) permeability of PLLA/SiOx film decreased by 78.7% and 71.7%, respectively, and the CO2 /O2 permselectivity increased by 32.5%, compared to that of the neat PLLA film. When the PLLA/SiOx film was applied to the equilibrium-modified atmosphere packaging of chilled meat, the gas composition in packaging reached a dynamic equilibrium with 6% to 11% CO2 and 8% to 13% O2 . Combined with tea polyphenol pads, which effectively inhibited the microbial growth, the desirable color of meat was maintained and an extended shelf life of 52 d was achieved for the chilled meat.