Formation of silicon nanocrystals embedded in high-kappa dielectric HfO2 and their application for charge storage

Authors

• wl, li
• jia, r
• chen, c
• hf, li
• liu, xy
• yue, hh
• ding, wc
• tc, ye
• kasai, s
• hashizume, t
• nj, wu
• bs, xu

Publication Date

Jan 01, 2011

Source

Knowledge Repository of SEMI,CAS

Keywords

• Si Nanocrystals
• Memory
• Technology
• Deposition
• Voltage
• Layer
• 微电子学
• Memory
• Technology
• Sedimentation
• Electromotive Force
• Layer
• Retention (Psychology)
• Memorization
• Arts, Useful
• Useful Arts
• Applied Science
• Science, Applied
• Industrial Arts
• Mechanic Arts
• Trades
• Science And Technology
• Technological Knowledge
• 沉[降堆]积
• Deposition
• Electrolytic Deposition
• Sedimentation (Deutsch)
• Sedimentation (Francais)
• Accretion
• Sediment
• Sedimentology
• Fresh-Water Sedimentation
• Marine Sedimentation
• 沉降
• 吸积
• Accumulation Of Sediments
• Deposition (Geology)
• Freshwater Sedimentation
• Geological Deposition
• Sediment Deposition
• Centrifugation
• 沉积
• 电势
• Electric Potential
• Potential, Electric
• Emf (Electromotive Force)
• Force, Electromotive
• Voltage
• Electrostatics
• Electricity, Static
• Static Electricity
• Electric Currents
• Currents, Electric
• Electropotential
• Coulomb Potential
• Emf
• Potentials (Electric)
• Voltage Drop
• Spannung
• Tension
• Chute De Tension
• Spannungsabfall
• 电压
• 电动势
• Electric Potential Difference
• I R Drop
• Potential (Electric)
• 层

License

Unknown

External links

• Full record on ir.semi.ac.cn