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FIB/SEM tomography segmentation by optical flow estimation.

Authors
  • Moroni, Riko1
  • Thiele, Simon2
  • 1 Laboratory for MEMS Applications, IMTEK Department of Microsystems Engineering, University of Freiburg, 79110 Freiburg, Germany. , (Germany)
  • 2 Forschungszentrum Jülich GmbH, Helmholtz-Institute Erlangen-Nürnberg for Renewable Energy (IEK-11), Egerlandstraße 3, 91058 Erlangen, Germany; Department of Chemical and Biological Engineering, Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstraße 3, 91058 Erlangen, Germany. Electronic address: [email protected] , (Germany)
Type
Published Article
Journal
Ultramicroscopy
Publication Date
Dec 01, 2020
Volume
219
Pages
113090–113090
Identifiers
DOI: 10.1016/j.ultramic.2020.113090
PMID: 32896757
Source
Medline
Keywords
Language
English
License
Unknown

Abstract

Focused ion beam/scanning electron microscopy tomography (FIB/SEM tomography) is the method of choice for the tomographic reconstruction of mesoporous materials systems in various fields such as batteries, fuel cells, filter applications or composite materials. However, due to so called shine-through artifacts in FIB/SEM tomographies of porous materials, their segmentation into pore space and solid material is a nontrivial task. Here, an optical flow-based method that utilizes shine-through artifacts for segmentation is introduced. Subsequently, the performance of the method is discussed by means of tomographic datasets of a polymer electrolyte fuel cell catalyst layer and a lithium ion battery composite electrode. Previous, manual segmentations of these datasets allow the evaluation of the results - for the catalyst layer an accuracy of 86.6% and a precision of 84.0% is reached. In both cases, the optical flow-based approach gives significantly better results than comparable segmentations obtained from gray-value threshold binarization. Copyright © 2020 The Authors. Published by Elsevier B.V. All rights reserved.

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