Affordable Access

Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

Authors
  • Ciressan, Nicoleta Diana Badila
  • Hibert, Cyrille
  • Mazza, Marco
  • Ionescu, Adrian M.
Publication Date
Jan 01, 2007
Source
Infoscience @ EPFL
License
Unknown
External links
Report this publication

Statistics

Seen <100 times