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Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection

Authors
  • Tang, Q. Y.1
  • Barry, P. S.1
  • Basu Thakur, R.1
  • Kofman, A.2
  • Nadolski, A.2
  • Vieira, J.2
  • Shirokoff, E.1
  • 1 University of Chicago, Kavli Institute of Cosmological Physics, Chicago, IL, 60637, USA , Chicago (United States)
  • 2 University of Illinois at Urbana-Champaign, Department of Astronomy, Urbana, IL, 61801, USA , Urbana (United States)
Type
Published Article
Journal
Journal of Low Temperature Physics
Publisher
Springer US
Publication Date
May 10, 2018
Volume
193
Issue
3-4
Pages
149–156
Identifiers
DOI: 10.1007/s10909-018-1941-0
Source
Springer Nature
Keywords
License
Yellow

Abstract

Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$_x$$\end{document} dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$_x$$\end{document} microstrip resonators.

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