Abstract A double-sided capacitive miniaturized accelerometer is presented. The photovoltaic etch-stop technique (PHET) is used to simplify the device fabrication. PHET being a relatively new technique, the paper emphasizes the design rules required in order to have an etch stop. The device is a uniaxial accelerometer with practically no cross-sensitivity, which can sense accelerations in the range -5 g to 5 g. The parasitic capacitances and the effects of the electric forces driving the device are cancelled out by its symmetry. The final device measures 2.2 mm × 2.0 mm × 1.5 mm.