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A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
53
Identifiers
DOI: 10.1016/0924-4247(96)01153-3
Keywords
  • Capacitive Accelerometers
  • Photovoltaic Etch-Stop Technique
Disciplines
  • Design

Abstract

Abstract A double-sided capacitive miniaturized accelerometer is presented. The photovoltaic etch-stop technique (PHET) is used to simplify the device fabrication. PHET being a relatively new technique, the paper emphasizes the design rules required in order to have an etch stop. The device is a uniaxial accelerometer with practically no cross-sensitivity, which can sense accelerations in the range -5 g to 5 g. The parasitic capacitances and the effects of the electric forces driving the device are cancelled out by its symmetry. The final device measures 2.2 mm × 2.0 mm × 1.5 mm.

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