Black silicon maskless templates for carbon nanotube forests

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Black silicon maskless templates for carbon nanotube forests

Authors
Publisher
Elsevier BV
Keywords
  • Wafer Uniformity
  • Diameter Distribution
  • We Present Here A Proof Of Concept For A Novel Fabrication Method Of Vertically Aligned Carbon Nanot
  • Utilizing Black Silicon Nanograss (A Forest Of Silicon Nanometer-Sized Spikes Created With Reactive
  • The Method Allows Maskless Definition Of Carbon Nanotube Forests With Control Of Their Density
  • Nanotube Diameter And Height
  • Four Nanograss Reactive Ion Etching Recipes Are Investigated And Their Wafer-To-Wafer Repeatability
  • And Density Control Is Discussed
  • Evaluation Of Carbon Nanotube Forests Grown On The Nanograss Substrates Is Presented With Discussion
  • And Catalyst Thickness Influence

Abstract

Black silicon maskless templates for carbon nanotube forests - DTU Orbit (25/04/14) Black silicon maskless templates for carbon nanotube forests - DTU Orbit (25/04/14) Black silicon maskless templates for carbon nanotube forests We present here a proof of concept for a novel fabrication method of vertically aligned carbon nanotube forests, utilizing black silicon nanograss (a forest of silicon nanometer-sized spikes created with reactive ion etching) coated with titanium tungsten diffusion barrier as a template. The method allows maskless definition of carbon nanotube forests with control of their density, nanotube diameter and height. Four nanograss reactive ion etching recipes are investigated and their wafer- to-wafer repeatability, wafer uniformity, and density control is discussed. Evaluation of carbon nanotube forests grown on the nanograss substrates is presented with discussion of their morphology, diameter distribution, and catalyst thickness influence. General information State: Published Organisations: Department of Micro- and Nanotechnology, Nanoprobes, Molecular Windows, Nanointegration, Imperial College London Authors: Wierzbicki, R. (Intern), Schmidt, M. S. (Intern), Boisen, A. (Intern), Engstrøm, D. (Ekstern), Mølhave, K. (Intern), Bøggild, P. (Intern) Keywords: (Carbon nanotubes, Black silicon, Nanograss, Maskless, Catalyst, Titanium tungsten) Pages: 110-113 Publication date: 2013 Main Research Area: Technical/natural sciences Publication information Journal: Microelectronic Engineering Volume: 104 ISSN (Print): 0167-9317 Ratings: FI (2012): 2 ISI indexed (2012): yes FI (2011): 2 ISI indexed (2011): yes FI (2010): 2 FI (2009): 1 FI (2008): 1 Original language: English DOIs: 10.1016/j.mee.2012.11.019 Source: dtu Source-ID: n::oai:DTIC-ART:elsevier/378590499::25821 Publication: Research - peer-review › Journal article – Annual report year: 2013

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