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Experiments and identification of the unbalance of aerostatic guideways on the micro-scale.

Authors
Type
Published Article
Journal
Sensors
1424-8220
Publisher
MDPI AG
Publication Date
Volume
14
Issue
3
Pages
4416–4427
Identifiers
DOI: 10.3390/s140304416
PMID: 24603638
Source
Medline

Abstract

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

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