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Experiments and identification of the unbalance of aerostatic guideways on the micro-scale.

Authors
Type
Published Article
Journal
Sensors
1424-8220
Publisher
MDPI AG
Publication Date
Volume
14
Issue
3
Pages
4416–4427
Identifiers
DOI: 10.3390/s140304416
PMID: 24603638
Source
Medline

Abstract

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