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Evaluating the Effects of Granulated Rubber and Glass Fibers in Polymer Concrete as a Structural Material for Wafer Grinding Machines

Authors
  • Kuehn, Kevin Gabriel
  • Streeter, Philip Randall
Publication Date
Jun 01, 2022
Source
[email protected]
Keywords
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Abstract

Polymer concrete is a composite material used to replace cast iron and steel in wafer grinding machines for vibration damping. During the grinding and lapping processes of manufacturing silicon wafers, excessive vibrations may cause subsurface damage which requires additional polishing and reduces yield. Nine compositions containing various levels of granulated rubber and glass fibers were manufactured. CRM WRF-10 granulated rubber was examined at 0%, 5%, and 10% and Corning Cem-Fil glass fibers were added at 0%, 0.5%, and 1% by weight. Smooth-On EpoxAcast 690 epoxy resin was held constant at 16% for each composition. Crushed granite aggregate from Martin Marietta, Santa Margarita Quarry composed the balance. Vibrational analysis and compression testing were performed to determine damping loss factor (η) and compressive strength. The loss factor was calculated from the frequency response function (FRF) generated by forced vibration of cantilever beam specimens between 10-2000Hz. Compression testing was performed according to ASTM C39. The composition with the highest compressive strength (9664 psi) contained 0% rubber and 0% fibers. Inversely, the composition with the highest loss factor contained the maximum additives (10% rubber, 1% fibers). It was found that increasing the amount of additives reduced the compressive strength and increased the loss factor. Increasing fiber amount did not increase the compressive strength of the material and had a smaller effect on increasing loss factor than granulated rubber.

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