Electronically integrated, mass-manufactured, microscopic robots
- Authors
- Type
- Published Article
- Journal
- Nature
- Publisher
- Springer Nature
- Publication Date
- Aug 25, 2020
- Volume
- 584
- Issue
- 7822
- Pages
- 557–561
- Identifiers
- DOI: 10.1038/s41586-020-2626-9
- Source
- Springer Nature
- License
- Yellow
Abstract
A new class of voltage-controllable electrochemical actuators that are compatible with silicon processing are used to produce over one million sub-hundred-micrometre walking robots on a single four-inch wafer.