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Electronically integrated, mass-manufactured, microscopic robots

Authors
  • Miskin, Marc Z.1, 2
  • Cortese, Alejandro J.1
  • Dorsey, Kyle1
  • Esposito, Edward P.1
  • Reynolds, Michael F.1
  • Liu, Qingkun1
  • Cao, Michael1
  • Muller, David A.1
  • McEuen, Paul L.1
  • Cohen, Itai1
Type
Published Article
Journal
Nature
Publisher
Springer Nature
Publication Date
Aug 25, 2020
Volume
584
Issue
7822
Pages
557–561
Identifiers
DOI: 10.1038/s41586-020-2626-9
Source
Springer Nature
License
Yellow

Abstract

A new class of voltage-controllable electrochemical actuators that are compatible with silicon processing are used to produce over one million sub-hundred-micrometre walking robots on a single four-inch wafer.

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