Electrical transport properties of the Si-doped cubic boron nitride thin films prepared by in situ cosputtering
- Authors
-
- ying, j
- zhang, xw
- yin, zg
- tan, hr
- zhang, sg
- fan, ym
- Publication Date
- Jan 01, 2011
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- High-Pressure Synthesis
- Vapor-Deposition
- Nucleation
- Emission
- Diamond
- Growth
- 半导体材料
- Ion Beam Lithography
- Vapor-Plating
- Nucleation
- Emission
- Diamond
- Development
- 溅射
- Focused Ion Beam Technology
- Fib Etching
- Fib Technology
- Focused Ion Beam Etching
- Ion Beam Applications
- Ion Beam Assisted Deposition
- Ibad
- Ion Lithography
- Ionised Cluster Beam Deposition
- Ionized Cluster Beam Deposition
- Sputter Etching
- Ion Etching
- Plasma Ashing
- Plasma Etching
- Reactive Ion Etching
- Reactive Sputter Etching
- Rie
- Sputtering
- Cathodic Sputtering
- Dc Sputtering
- Diode Sputtering
- Magnetron Sputtering
- Radiofrequency Sputtering
- Reactive Sputtering
- Rf Sputtering
- Triode Sputtering
- Vacuum Deposition
- Evaporation (Film Deposition)
- Vapour Deposition
- Deposition Techniques
- Vapor Deposition
- Kathodenzerstaeubung
- Pulverisation Cathodique
- Ion Enhanced Deposition
- 真空镀膜
- Coating, Vacuum
- Deposition, Vapor
- Vacuum Coating
- Vacuum Metallizing
- Vapor-Phase Deposition
- Bedamfung
- Deposition De La Phase Vapeur
- Chemical Vapor Deposition
- Cvd (Deposition)
- 成核
- Germination
- Keimbildung
- 成核作用
- Nuclei (Transformation)
- Seeding
- Seeding (For Crystal Growth)
- Emanation
- X Ray Emission
- Kite
- Strombus Or Kite Or Diamond
- Strombus
- 展开
- Growth
- Ontogeny
- Alloy Development
- 增长性
- Animal Growth
- Hypertrophy
- Maturing
- Growth Rate (Animals)
- License
- Unknown
- External links
