Effects of grain size on resistance and transmittance transition of vanadium oxide thin film
- Authors
-
- Liang, Ji-Ran
- Hu, Ming
- Kan, Qiang
- Chen, Tao
- Liang, Xiu-Qin
- Chen, Hong-Da
- Liang, J.-R.([email protected])
- Publication Date
- Jan 01, 2011
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- Annealing
- Electric Properties
- Grain Size And Shape
- Optical Transitions
- Oxide Films
- Oxides
- Thin Films
- Vanadium
- Vanadium Alloys
- Vanadium Compounds
- 光电子学
- Rapid Thermal Processing
- Heat Treatment
- Electrical Properties
- Grain
- Oxide Films
- Oxide Coatings
- Oxides
- Thin Films
- Bore
- Vanadium Alloys
- Vanadium Compounds
- Rapid Thermal Annealing
- Rapid Thermal Process
- Annealing
- Incoherent Light Annealing
- Arc Lamp Annealing
- Flash Lamp Annealing
- Halogen Lamp Annealing
- Rta
- Rapid Thermal Nitridation
- Rapid Thermal Oxidation
- Rtp
- Recrystallisation Annealing
- Recrystallization Annealing
- Solution Annealing
- Solution Annealing Mechanisms
- Loesungsgluehung
- Mecanismes De Mise En Solution (Recuit)
- Solution Annealing Parameters
- Loesungsgluehbedingungen
- Parametres De Recuit En Solution Solide
- 辐射损伤
- Austempering
- Calcination
- Electron Beam Annealing
- Electron Beam Applications
- Electron Beam Deposition
- Graphitising
- Graphitizing
- Austenitising
- Homogenising
- Sensitisation (Metallurgy)
- Treatment, Heat
- Laser Beam Annealing
- Laser Annealing
- Magnetic Annealing
- Annealing, Magnetic
- Normalising
- Normalizing
- Radiation Effects
- Damage, Radiation
- Irradiation Effects
- Particle Scattering
- Radiation Damage
- Thermal Spikes
- Spheroidizing
- Thermomagnetic Treatment
- Ultraviolet Radiation Effects
- Uv Radiation Effects
- Annealing Mechanisms
- Gluehvorgang
- Heat Treatment Mechanisms
- Mecanismes De Recuit
- Annealing Parameters
- Gluehbedingungen
- Heat Treatment Parameters
- Parametres De Recuit
- Annealing Processes
- Gluehen
- Heat Treatment Processes
- Procede De Recuit
- Calcination (Francais)
- Kalzinierung
- Heat Treating
- Magnetische Gluehung
- Recuit Magnetique
- Normalizing Mechanisms
- Mecanismes De Normalisation
- Mecanismes De Recuits De Normalisation
- Normalisierung
- Normalizing Parameters
- Normalisierungsbedingungen
- Parametres De Normalisation
- Defauts D Irradiation
- Strahlungs Schaeden
- Irradiation
- Heating
- Heating Methods
- Thermal Treatment
- Alpha Annealing
- Alphatizing
- Galvannealing
- Soft Annealing
- Irradiation Damage
- Elektrische Eigenschaften
- Proprietes Electriques
- Electrical Props
- Bardeen Approximation
- Electrical Conductivity
- Superconductivity
- Electric Properties
- Negative Resistance
- Negative Resistance Effects
- Grain Size And Shape
- Dimensions Et Formes Du Grain
- Grain Shape
- Grain Size
- Korngroesse Und Kornform
- Grain Size Distribution
- Sediment Size
- Films D Oxydes
- Oxidfilme
- 氧化膜
- Oxide Coating
- Oxidbeschichten
- Revetements D Oxide
- Cathodic Coatings (Oxide)
- 氧化物
- Oxide
- Oxydes
- Films, Thin
- Solid Film
- Dielectric Thin Films
- Epitaxial Layers
- High-K Dielectric Thin Films
- Insulating Thin Films
- Low-K Dielectric Thin Films
- Semimetallic Thin Films
- Superconducting Epitaxial Layers
- Superconducting Superlattices
- Superconducting Thin Films
- Duennfilme
- Films Minces
- 无机发光材料
- [+]
- Bor
- Boron
- Carbon
- Carbone
- Kalium
- Kohlenstoff
- Phosphor
- Phosphore
- Phosphorus
- Potassium
- Potassium (Francais)
- Schwefel
- Soufre
- Sulfur
- Sulphur
- Tungsten
- Tungstene
- Uran
- Uranium
- Uranium (Francais)
- Vanadium
- Vanadium (Deutsch)
- Vanadium (Francais)
- Wolfram
- Wolfram (Deutsch)
- Yttrium
- Yttrium (Deutsch)
- Yttrium (Francais)
- V
- Vibrational
- License
- Unknown
- External links
Abstract
Vanadium oxide thin films were deposited by reactive direct current facing targets magnetron sputtering, and then annealed in oxygen ambience under different temperature to fabricate phase transition vanadium dioxide thin films with different grain size. The transformation of resistance and transmittance of vanadium oxide thin films were measured across phase transition. The results show that the proportion of VO2 in film is about40%(atom fraction) after annealed in300°C and360°C, the films have insulator-metal phase transition properties. The grain size is50 nm and100 nm, respectively. After annealing at360°C, the surface of vanadium oxide thin film becomes compact and some grain comes to merge. Electrical and optical transition properties across phase transition show that the transition temperature decreases as grain size increasing, however, the temperature width of phase transition keep constant. The temperature width of phase transition obtained from electrical transition properties is about30°C, but that from optical transition properties is only8°C.
