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An evaporation rate meter for use in the control of Ti sublimation pumps

Authors
Journal
Vacuum
0042-207X
Publisher
Elsevier
Publication Date
Volume
34
Issue
7
Identifiers
DOI: 10.1016/0042-207x(84)90209-4
Disciplines
  • Design

Abstract

Abstract A titanium evaporation rate meter has been designed and built. The basic idea of the meter is described and discussed. It makes use of the well-known phenomenon of the change of tungsten thermoemission due to the deposition of a titanium monomolecular layer on the emitting surface. Details of the design and construction of the measuring gauge and its characteristics are presented.

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