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Variband GaAs(1 - x)Px: a material for pressure sensors

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
30
Identifiers
DOI: 10.1016/0924-4247(92)80208-k

Abstract

Abstract Variband GaAs (1 - x) P x has been used for creating a compact hydrostatic pressure sensor. The optimal phosphorus distribution profile in gallium arsenide-phosphide along the thickness of the resistor enables the temperature sensitivity of the output signal to be minimized in the temperature range 250–550 K.

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