Uncertainties in geotechnical Engineering is inevitable. The soil properties may disperse within a significant range over a domain. Thus the factor of safety is used in the deterministic approach which account for the uncertainty associated with the soil properties. This does not consider the sources and amount of uncertainty associated with the system. Limit state design of the structure is difficult to estimate using deterministic methods. So it is reasonable to study the probability of failure of the structure. In the present study reliability analysis has been made for slope stability, geogrid reinforced footing and the sheet pile wall using finite element method (FEM). The limit state function is developed using response surface methods based on finite element models using commercial software PLAXIS 9.0. The FEM model is validated by analysing case studies, wherever available. Full factorial design is used for development of response surface models. The reliability analysis is performed using first order reliability method in the present study. The need for reliability analysis and the corresponding factor of safety is discussed. Parametric study has been done by considering the variability in soil parameter.