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Surface characterization and identification by laser diffraction as a complementary technique to RBS

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
53
Issue
1
Identifiers
DOI: 10.1016/0168-583x(91)95447-l

Abstract

Abstract An optical interferometry technique is presented which can provide information of the surface morphology of remote samples. The technique can be used as a complement to RBS-based techniques or indeed as a substitute when RBS is not practical.

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