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Profils de concentration obtenus par spectrométrie auger et décapage ionique: Influence du gradient de concentration et détermination de la profondeur analysée

Authors
Journal
Surface Science
0039-6028
Publisher
Elsevier
Publication Date
Volume
94
Identifiers
DOI: 10.1016/0039-6028(80)90016-3

Abstract

Abstract In this paper two relations are established: one of them takes account of the concentration gradient effect on the concentration measurements and the second one allows to convert sputtering times to depths during a composition depth profiling by AES.

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