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Growth of Ultrahigh Density Single-Walled Carbon Nanotube Forests by Improved Catalyst Design

Authors
Journal
ACS Nano
1936-0851
Publisher
American Chemical Society
Publication Date
Volume
6
Issue
4
Identifiers
DOI: 10.1021/nn203035x
Keywords
  • Single-Walled Carbon Nanotubes
  • Vertical Forest
  • Chemical Vapor Deposition
  • Ultrahigh Density
  • Characterization
  • Catalyst Preparation
Disciplines
  • Design

Abstract

We have grown vertically aligned single-walled carbon nanotube forests with an area density of 1.5 × 10 cm , the highest yet achieved, by reducing the average diameter of the nanotubes. We use a nanolaminate Fe-Al O catalyst design consisting of three layers of Al O , Fe, and Al O , in which the lower Al O layer is densified by an oxygen plasma treatment to increase its diffusion barrier properties, to allow a thinner catalyst layer to be used. This high nanotube density is desirable for using carbon nanotubes as interconnects fin integrated circuits. © 2012 American Chemical Society.

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