Affordable Access

Publisher Website

Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges

Authors
Journal
Surface and Coatings Technology
0257-8972
Publisher
Elsevier
Publication Date
Volume
137
Issue
1
Identifiers
DOI: 10.1016/s0257-8972(00)01090-2
Keywords
  • Plasma
  • Pulsed Dc-Glow Discharge
  • Anode
  • Sputtering
  • Ion-Energy Distribution
  • Simulation

Abstract

Abstract We present measurements of ion-energy distributions of the ions impinging on the grounded anode of a pulsed argon DC-glow discharge (cathode voltages of –300 to –450 V, and a gas pressure of 0.5 mbar) with on and off pulse times of 100–900 μs. During the on pulses of the discharge, as expected, low energy ions (<10 eV) were observed, originating from the potential difference between the plasma (i.e. the plasma potential) and the grounded anode. However, during the initial tens of microseconds of the off pulse, ions were detected with energies of the order of the cathode potential (i.e. several hundred eV). Furthermore, voltage measurements of a floating anode show that the plasma potential has a high positive voltage peak during the onset of the off pulse. The explanation of the observed phenomena must be sought in the sudden change in the boundary conditions of the discharge and the subsequent redistribution of charged particles, leading ultimately to the collapse of the discharge. This has been confirmed by Monte-Carlo simulations of the discharge.

There are no comments yet on this publication. Be the first to share your thoughts.

Statistics

Seen <100 times
0 Comments

More articles like this

Pulsed laser ablation of borax target in vacuum an...

on Applied Surface Science Jan 01, 2006

Anode effects on energetic particle bombardment of...

on Surface and Coatings Technolog... Jan 01, 2000

Influence of ion and neutral flux on the propertie...

on Surface and Coatings Technolog... Jan 01, 2002
More articles like this..