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The surface modification using argon radio-frequency plasmas of highly oriented pyrolytic graphite: a scanning tunnelling microscopy study

Authors
Journal
Surface Science
0039-6028
Publisher
Elsevier
Publication Date
Volume
279
Identifiers
DOI: 10.1016/0039-6028(92)90755-u

Abstract

Abstract Scanning tunnelling microscopy has been used to characterise the surface modification of highly oriented pyrolytic graphite (HOPG) following exposure to a radio-frequency (RF) argon plasma. The STM topography of cleaved HOPG surfaces shows dramatic alteration in the course of etching. The surface features observed are strongly dependent on the plasma etching conditions used. Strains in the graphite lattice induced by defects generated by the low energy ions present during sputtering of the HOPG surface are believed to be responsible for the formation of the topographical features observed.

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