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Microfabricated Device for Rapid Impedance Measurements on Single Biological Cells

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Abstract

A microfluidic chip for performing impedance measurements on micron-sized particles is presented. The device consists of micro-electrodes patterned onto pyrex glass wafers and a microfluidic channel formed in PDMS, cast using a dry-etched silicon wafer as a master. The PDMS channel was positioned over the electrodes to form a channel to contain the sample. The system is capable of performing impedance measurements at a number of spot frequencies allowing the dielectric characteristics of large numbers of individual particles to be obtained in a matter of seconds.

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