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A double-sided surface scanning platform for sapphire substrate quality assessment

Authors
  • Cheng, Fang;
  • Chen, Tao;
  • Yu, Qing;
  • Cui, Changcai;
  • Tjahjowidodo, Tegoeh; 37544;
  • Su, Hang;
Publication Date
Nov 01, 2023
Source
Lirias
Keywords
License
Unknown
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Abstract

status: accepted

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