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Development of plasma technology at the University of Malaya

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  • Qa75 Electronic Computers. Computer Science

Abstract

In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.

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