Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD

Authors

• Zoubian, F
• Rabat, H.
• Aubry, O.
• Dumuis, N
• Dozias, S
• Muñoz-Rojas, D
• Hong, Dunpin

Publication Date

May 01, 2019

Source

Kaleidoscope Open Archive

Keywords

• [Spi.Plasma]Engineering Sciences [Physics]/Plasmas

Language

English

License

Unknown

External links

• Full record on hal.archives-ouvertes.fr