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Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics.

Authors
  • Zeng, Desheng1
  • Liu, Qiang1
  • Mei, Chenyang1
  • Li, Hongwei1
  • Huang, Qingzhong1
  • Zhang, Xinliang1
  • 1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China. , (China)
Type
Published Article
Journal
Micromachines
Publisher
MDPI AG
Publication Date
Jul 21, 2022
Volume
13
Issue
7
Identifiers
DOI: 10.3390/mi13071155
PMID: 35888971
Source
Medline
Keywords
Language
English
License
Unknown

Abstract

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 106, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 106, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of -17.0 dB is achieved at a pump power of 6.50 dBm.

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