Intermixing in Si/Fe/Si trilayer induced by 120 MeV Au ions has been studied. X-ray fluorescence provides information about the depth distribution of Fe atoms, while Mössbauer spectroscopy and XAFS provide information about the changes in the local structure. In the as-deposited film Fe layer is amorphous in nature with a significant Si content in it. Irradiation to a fluence of 1 ×1013 ions/cm2 results in formation of non-magnetic intermixed layer with its hyperfine parameter close to those of Fe0.5Si with CsCl structure. XAFS measurements under X-ray standing wave condition provide depth resolved structural information.