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Deep purification of hexamethyldisilazane

Authors
  • Grinberg, E. E.1
  • Ukhin, V. I.1
  • Rakhlin, V. I.2
  • Ryabtseva, M. V.1
  • Levin, Yu. I.1
  • Strel’nikova, I. E.1
  • 1 Federal State Unitary Enterprise “State Research Institute of Chemical Reagents and High Purity Chemicals”, Moscow, Russia , Moscow (Russia)
  • 2 Siberian Branch of Russian Academy of Sciences, Irkutsk Institute of Chemistry, Irkutsk, Russia , Irkutsk (Russia)
Type
Published Article
Journal
Russian Journal of Applied Chemistry
Publisher
SP MAIK Nauka/Interperiodica
Publication Date
Nov 01, 2011
Volume
84
Issue
11
Pages
1909–1913
Identifiers
DOI: 10.1134/S1070427211110127
Source
Springer Nature
Keywords
License
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Abstract

We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods.

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