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Hydrogen segregation at the Al/Si(1 1 1) interface

Authors
Journal
Physica B Condensed Matter
0921-4526
Publisher
Elsevier
Publication Date
Volume
248
Identifiers
DOI: 10.1016/s0921-4526(98)00209-9
Keywords
  • Hydrogen In Metals
  • Neutron Reflection
  • Depth Profile

Abstract

Abstract The density depth profile of hydrogen trapped at an epitaxial solid–solid interface has been measured by neutron reflection. The interface was between a Si(1 1 1) substrate and an epitaxial film of Al 1500 Å thick, into which hydrogen was introduced by low-energy implantion. The measurements, carried out at room temperature, indicated that a total of 0.7×10 16 H atoms/cm 2 were trapped at the interface. This number corresponds approximately to one atomic layer of liquid hydrogen; however, hydrogen was found to be spread over a thickness of 60 Å. Cooling the sample from room temperature to 220 K did not significantly alter the distribution of hydrogen trapped at the interface.

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