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A novel electron beam evaporation technique for the deposition of superconducting thin films

Authors
Journal
Physica C Superconductivity
0921-4534
Publisher
Elsevier
Publication Date
Volume
175
Identifiers
DOI: 10.1016/0921-4534(91)90275-4

Abstract

Abstract Superconducting thin films of BiSrCaCuO have been deposited using a novel electron beam evaporation technique. In this technique the crucible has a groove around its circumference and rotates continuously during deposition. The source material is loaded in the form of pellets of the composite. Both oxides as well as flourides have been used in the starting material and a comparison of the film properties has been made. The best film was obtained on a MgO(100) substrate with a T c onset at 85 K and T c zero at 77 K using calcium flouride in the source material.

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