DC microplasma arrays on silicon wafers

Authors

• Dussart, Remi
• Michaud, Ronan
• Iseni, Sylvain
• Aubry, Olivier
• Stolz, Arnaud
• Dzikowski, Sebastian
• Gathen, Volker
• Overzet, Lawrence J
• Pitchford, Leanne

Publication Date

Jan 01, 0002

Source

Kaleidoscope Open Archive

Keywords

• [Phys.Phys.Phys-Plasm-Ph]Physics [Physics]/Physics [Physics]/Plasma Physics [Physics.Plasm-Ph]
• [Spi.Plasma]Engineering Sciences [Physics]/Plasmas
• [Spi.Fluid]Engineering Sciences [Physics]/Reactive Fluid Environment
• [Spi.Opti]Engineering Sciences [Physics]/Optics / Photonic
• [Sdv.Ib]Life Sciences [Q-Bio]/Bioengineering

Language

English

License

Unknown

External links

• Full record on hal.archives-ouvertes.fr