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High performance III-V MOSFETs: a dream close to reality?

Institute of Electrical and Electronics Engineers
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  • Tk Electrical Engineering. Electronics Nuclear Engineering


We have studied the performance potential of sub 100 nm compound MOSFETs with InGaAs channel and high-k gate insulator, using ensemble Monte Carlo simulations. The results show that such devices could deliver 200-300% increase in the drive current compared to conventional MOSFETs with analogous channel lengths and device structure. This improvement is much higher than the 20-30% drive current increase in similar devices with strained Si channels on virtual SiGe substrates. As a viable solutions to the constant drive current bottleneck anticipated in the International Roadmap for Semiconductors for the next generations of Si MOSFETs it advocates further research in respect of the manufacturability of compound MOSFETs.

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