Abstract Experimental studies of inelastic interaction of low-energy Ar + ions (200–1400 eV) with SrTiO 3(100) surface are presented. The studies were performed by means of Auger spectroscopy, secondary ion mass spectroscopy and ion surface scattering. The oscillating dependence of the Sr ion yield on the incident Ar ion energy was found. The Sr ion yield and the scattered Ar ion intensity were oscillated in antiphase. The results are interpreted in terms of the quasi-resonant charge-exchange model. The performed simulation of the ion charge-exchange confirms the validity of the model used.