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Fabrication of an electrostatic lens array with separate electrodes and shield membranes using the UV-LIGA process

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/s0924-4247(01)00827-5
Keywords
  • Einzel Lens
  • Electron Beam
  • Lithography

Abstract

Abstract A lens array of 20×20 three element electrostatic lenses (einzel lenses) for multiple electron beam direct write (MEBDW) systems is presented. It possesses shield membranes to prevent cross talk (or interferences between lenses) and the separate electrodes to provide individual control. Each lens has a hole of 80 μm diameter and is separated from the neighbors by 200 μm. Three electrode substrates were mechanically assembled on a base substrate by using V-grooves and optical fibers. Lens action of the assembled lens array was confirmed in an experimental set-up.

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