Abstract A lens array of 20×20 three element electrostatic lenses (einzel lenses) for multiple electron beam direct write (MEBDW) systems is presented. It possesses shield membranes to prevent cross talk (or interferences between lenses) and the separate electrodes to provide individual control. Each lens has a hole of 80 μm diameter and is separated from the neighbors by 200 μm. Three electrode substrates were mechanically assembled on a base substrate by using V-grooves and optical fibers. Lens action of the assembled lens array was confirmed in an experimental set-up.