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A KrF-laser excited by a capacitively coupled longitudinal discharge

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Elsevier
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Abstract

The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

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