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A FAB-SIMS/SNMS apparatus

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
33
Identifiers
DOI: 10.1016/0168-583x(88)90613-1
Disciplines
  • Physics

Abstract

Abstract A FAB-SIMS/SNMS (fast atom bombardment secondary ion mass spectrometry and sputtered neutral mass spectrometry) apparatus has been studied. In the apparatus, an electron bombardment ionizer for ionization of sputtered neutrals and a quadrupole mass spectrometer for mass analysis are used. The primary beam is the fast oxygen atom beam with about 2.5 keV of the kinetic energy and 10 14 atoms/s of the intensity. Secondary ion spectra and sputtered neutral spectra are obtained in similar intensity for samples of a Cu-Be alloy and a polyethylene film. As the primary beam has no electric charge, even insulator samples are easily analyzed without any trouble caused by electrical charging on the sample surface.

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