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Crystallographic Silicon-Etching for Ultra-High Aspect-Ratio FinFET

Authors
  • Jovanovic, V. (author)
  • Suligoj, T. (author)
  • Nanver, L.K. (author)
Publication Date
May 18, 2008
Source
TU Delft Repository
Language
English
License
Unknown
External links

Abstract

Electrical Engineering, Mathematics and Computer Science

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