status published
CNT EUV pellicle: moving towards a full-size solution Authors Timmermans, Marina Y; Pollentier, Ivan; Lee, Jae Uk; Meersschaut, Johan; 9775; Richard, Olivier; Adelmann, Christoph; Huyghebaert, Cedric; Gallagher, Emily E; Publication Date Jan 01, 2017 Source Lirias Keywords Science & Technology Physical Sciences Optics Euv Pellicle Carbon Nanotubes Free-Standing Film Euv Transmission Walled Carbon Nanotubes Fabrication Films Sheets License Unknown External links Full record on lirias.kuleuven.be Abstract status: published