CNT EUV pellicle: moving towards a full-size solution

Authors

• Timmermans, Marina Y;
• Pollentier, Ivan;
• Lee, Jae Uk;
• Meersschaut, Johan; 9775;
• Richard, Olivier;
• Adelmann, Christoph;
• Huyghebaert, Cedric;
• Gallagher, Emily E;

Publication Date

Jan 01, 2017

Source

Lirias

Keywords

• Science & Technology
• Physical Sciences
• Optics
• Euv Pellicle
• Carbon Nanotubes
• Free-Standing Film
• Euv Transmission
• Walled Carbon Nanotubes
• Fabrication
• Films
• Sheets

License

Unknown

External links

• Full record on lirias.kuleuven.be