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Chemical Vapor Deposition Kinetics and Localized Growth Regimes in Combinatorial Experiments

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Publication Date
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Infoscience @ EPFL
Keywords
  • Adsorption
  • Chemical Vapor Deposition
  • Chemisorption
  • Nanotechnology
  • Thin Films
  • Carbon Nanotubes
  • Compositional Spreads
  • Beam Epitaxy
  • Titanium
  • Films
  • Optimization
  • Adsorption
  • Precursors
  • Parameters
  • Chemistry
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