Charakterisierung der Photonen-stimulierten Desorption von halogenierten Siliziumoberflaechen mit stehenden Roentgenwellenfeldern

Authors

• Flege, J.I.
• Deutsches Elektronen-Synchrotron (DESY),...
• univ., 12 hamburg

Publication Date

Jan 01, 2004

Source

OpenGrey Repository

Keywords

• 20K - Solid-State Physics
• Adsorption
• Chlorine
• Chlorine Ions
• Density Functional Method
• Desorption
• Dimers
• Electron Spectra
• Electronic Structure
• Emission Spectra
• Energy Spectra
• Etching
• Experimental Data
• Integral Cross Sections
• Kev Range 01-10
• Molecular Ions
• Morphology
• Photoelectric Emission
• Photon-Ion Collisions
• Roughness
• Scanning Tunneling Microscopy
• Silicon
• Surfaces
• Temperature Range 0400-1000 K

Language

German

License

Unknown

External links

• Full record on hdl.handle.net