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Characterization of electrical and crystallographic properties of metal layers at deca-nanometer scale using Kelvin probe force microscope

Authors
  • N. Gaillard
  • D. Mariolle
  • F. Bertin
  • M. Gros-Jean
  • M. Proust
  • A. Bsiesy
  • A. Bajolet
  • S. Chhun
  • M. Djebbouri
Type
Published Article
Journal
Microelectronic Engineering
Publisher
Elsevier
Volume
83
Issue
11-12
Pages
2169–2174
Source
Spintec
Keywords
License
Unknown
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