Abstract We report on the resonance characteristics of a Si-based ring resonator model with the theory of multiple-beam interference. The resonator consists of a track pattern ring channel waveguides with radius of 2 cm, two input/output directional couplers and one ring resonator coupler. Using the wide angle finite-difference beam propagation method (WA-FDBPM), we presented optimal design of ring resonator and succeed in fabricating the ring resonator by Plasma Enhanced Chemical Vapor Deposition (PECVD) method. Observed from the resonance curve, finesse of 16.7 is measured. And a rate detection limit of 1.7°/h can be evaluated.