Affordable Access

Publisher Website

Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits

Authors
Journal
Microelectronics Reliability
0026-2714
Publisher
Elsevier
Volume
51
Identifiers
DOI: 10.1016/j.microrel.2011.07.047
Disciplines
  • Design
  • Physics

Abstract

Abstract Current state-of-the-art in backside fault isolation and logic analysis utilizes solid immersion lens (SIL) imaging in the central configuration. An attractive advancement is the development and integration of an aplanatic SIL, which allows significant improvement in resolution, signal acquisition and isolation capabilities, especially for the 22nm node and beyond. However, aplanatic SIL configurations introduce both chromatic and spherical aberrations. We have developed backing objective designs capable of correcting for chromatic aberrations allowing application in photon emission microscopy, as well as deformable mirror designs and experiments that eliminate spherical aberrations of aplanatic SILs to account for variations in substrate thickness and off-axis imaging.

There are no comments yet on this publication. Be the first to share your thoughts.