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Advanced meshing and solution techniques for industrial 3-D electromagnetic simulations

Technische Universiteit Eindhoven
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  • Computer Science
  • Design
  • Engineering
  • Physics


TECHNISCHE UNIVERSITEIT EINDHOVEN Department of Mathematics and Computer Science MASTER THESIS Advanced meshing and solution techniques for industrial 3-D electromagnetic simulations by Volha Shchetnikava Supervisors: Prof. Dr. W.H.A. Schilders (TU/e) Dr. ir. W. Schoenmaker (Magwel) August 27, 2009 Abstract Today’s integrated circuits (IC) can contain several hundred millions of nanometer- sized elements packed onto chips. Simulating and verifying these elements before fabricating a real IC is critical to chip designers, as building and trou- bleshooting a prototype are very expensive, time consuming and difficult processes. In short terms, simulation can be expressed as experiments with a model. Thus, numerical simulation in the Chip Industry replaces time consuming and expensive experiments and saves resources. The software provided by MAGWEL aims at helping design engineers and scientists to gain an in-depth understanding of the electromagnetic fields and the currents and charge distributions in an environment consisting of differ- ent types of materials simultaneously. Thus, at the same instance insulators, semiconductors and metallic regions can be present in the computational do- main. Typical applications are parts of integrated circuits consisting of doped semiconducting domains together with the selected part of the interconnect structures, possibly extended with integrated on-chip passive elements. The software considers three dimensions in space. The sheer density of the latest chips force the modern simulation tools, and also MAGWEL’s software, to develop new numerical techniques and algorithms in order to decrease memory usage and computation time of sim- ulations. In the first part, a simplification of the dual mesh algorithm for a partic- ular case is presented. This method has decreased the time of the dual mesh constructing process 7 times. The second part of this thesis concentrates on developing an efficient direct solver for sparse linear systems of

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