Affordable Access

Publisher Website

Surface analyses by low energy SEM in ultra high vacuum

Authors
Journal
Ultramicroscopy
0304-3991
Publisher
Elsevier
Publication Date
Volume
15
Issue
3
Identifiers
DOI: 10.1016/0304-3991(84)90039-1
Disciplines
  • Design

Abstract

Abstract The design and performance of an ultra high vacuum SEM with a field emission gun for solid surface are described. In situ observations of an Si surface are demonstrated for processes of surface cleaning by flashing, step formation of Si(111) surface by annealing, epitaxial growth of metal-deposited layers on Si surfaces by heat treatment, surface segregation of Ni-contaminated layer on the Si(110) by heat treatments and phase transitions of reconstructed structures by electron energy loss spectroscopy.

There are no comments yet on this publication. Be the first to share your thoughts.