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Carbon film condensation from energetic ions

Authors
  • Hirvonen, Juha-Pekka
  • Koskinen, Jari
  • Scheibe, Hans-Joachim
  • Kaukonen, Markus
  • Nieminen, Risto
  • Keränen, J
Publication Date
1995
Source
VTT Publications Register
License
Unknown

Abstract

42nd National Symposium of American Vacuum Society. Minneapolis, USA, 16 - 20 Oct. 1995

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