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Calibration of Quartz Glass Tubes by Vapor Phase Deposition

Authors
  • Bureev, S. V.1
  • Eron’yan, M. A.1
  • Kulesh, A. Yu.2
  • Meshkovskii, I. K.2
  • Romashova, E. I.1
  • Tsibinogina, M. K.3
  • 1 Scientific-Research and Technological Institute of Optical Materials Science, JSC, All-Russia Scientific Center, S. I. Vavilov State Optics Institute, St. Petersburg, Russia , St. Petersburg (Russia)
  • 2 St. Petersburg National Research University for Information Technologies in Mechanics and Optics, St. Petersburg, Russia , St. Petersburg (Russia)
  • 3 Perm Scientific-Industrial Instrument Engineering Company, Perm, Russia , Perm (Russia)
Type
Published Article
Journal
Glass and Ceramics
Publisher
Springer US
Publication Date
Sep 21, 2014
Volume
71
Issue
5-6
Pages
172–174
Identifiers
DOI: 10.1007/s10717-014-9645-7
Source
Springer Nature
Keywords
License
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Abstract

The results of work on the stabilization of the wall thickness of quartz tubes by means of external vapor-phase deposition during high-temperature hydrolysis of silicon tetrachloride are presented. The technological parameters of deposition and sintering of a porous layer are determined. Defect-free layers of glass of thickness greater than 0.2 mm with the possibility of lowering the circumferential thickness variation of the tubes from 0.2 to 0.05 mm are obtained.

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