Affordable Access

Calculation of oxide sputter yields

Authors
  • Depla, Diederik
  • Van Bever, Josja
Publication Date
Jan 01, 2024
Source
Ghent University Institutional Archive
Keywords
Language
English
License
Green
External links

Abstract

An existing semi -empirical model to calculate the compound sputter yields is used to fit a large set of literature data on oxide sputter yields which consists of data for 21 different materials, and 65 datasets. The dedicated fitting procedure enables to link the surface binding energy of the metal and oxygen atoms with the oxide cohesive energy. This approach resolves a long standing problem in the research community on the accurate prediction of oxide sputter yields.

Report this publication

Statistics

Seen <100 times