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Fabrication of nanomechanical optical devices with aligned wafer bonding

Authors
Publisher
Springer
Publication Date
Disciplines
  • Chemistry

Abstract

This paper reports on a new method for making some types of integrated optical nanomechanical devices. Intensity modulators as well as phase modulators were fabricated using several silicon micromachining techniques, including chemical mechanical polishing and aligned wafer bonding. This new method enables batch fabrication of the nanomechanical optical devices, and enhances their performance.

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