Abstract Recently, fast computational methods based on directly thinning the matrix of Method of Moment (MoM), have been introduced. In this paper, we propose a simply technique, based on the concept of Measured Equation of Invariance (MEI), to thin the MoM matrix numerically. This technique is referred to as Matrix Decomposition by MEI (MDMEI). A little effort is required to add the MDMEI to any of the variety of MoM programs for electromagnetic problems, such as the electrostatic problems, wire antennas, and two-dimensional (2-D) conducting object scattering. However, in this paper we only demonstrate how MDMEI is used in the capacitance extraction in integrated-circuit interconnects. The approach is verified by 2-D and 3-D examples with computing errors within 2–4%. For the present achievement, the sparsity rates of the resultant matrices in MDMEI depend on the problem to be solved. Further research is required to keep the bandwidths unchanged with object size increasing so that the sparsity rates of the MDMEI matrices are expected to improve.